Biopolis Dresden Imaging Platform

Hitachi TM 1000 (Hitachi)

table-top instrument for routine inspection

Category

SEM

Location

room -1.118, EMF & Histo CMCB, Map

Suitable For

surface imaging of metal sputtered samples

surface imaging of unsputtered samples

Voltage

15 kV

Resolution

30 nm

Magnification

10000 x

Gun
Tungsten
Stage

manual

manual xy

Movements: xy

Detector

BSE

Type: back scattered electrons
Manufacturer
Hitachi
Additional Information
  • DRESDEN concept ID 1317
Touch Date
24.05.2017